NSC 212 - Basic Nanofabrication Process

3 Credit Hours (Lab)

This course provides an overview of basic processing steps in Nanofabrication. The majority of the course details a step-by-step description of the equipment and processes needed to fabricate devices and structures. Processing flow will be examined for structures such as microelectromechanical (MEM) devices, biomedical “lab-on-a-chip” structures, display devices, and microelectronic devices including diode, transistor, and full CMOS structors. Students will learn the similarities and differences in both equipment and process flow for each configuration by undertaking “hands-on” processing.

Prerequisite(s): NSC 211