NSC 212 - Basic Nanotechnology Process

3 Credit Hours (Lab)

This course is an overview of the broad spectrum of processing involved in “top down”, “bottom up” , and hybrid nanofabrication. The majority of the course details a step-by-step description of the equipment, facilities processes and process flow used in today’s device and structure fabrication. Students learn to appreciate processing and manufacturing concerns including safety, process control, contamination, yield, and processing interaction. The students design process flows for micro- and nano-scale systems. Students learn the similarities and differences in “top down” and “bottom up” equipment and process flows by undertaking hands-on processing. This hands-on overview exposure covers basic nonfabricaiton processes including deposition, etching, and pattern transfer.

Prerequisite(s): NSC 211