NSC 211 - Materials, Safety & Equipment Overview for Nanofabrication

3 Credit Hours (Lab)

This course provides an overview of basic Nanofabrication processing equipment and materials handling procedures. The focus is on procedural, safety, environment, and health issues in equipment operation and materials handling. Topics to be covered will include: cleanrooms operation, safety and health issues; vacuum pump systems operation, environmental safety, and health issues (covering direct drive mechanical roots blowers, turbomolecular, and dry mechanical systems); furnace operation, safety, environmental, and health issues (covering horizontal, vertical, rapid thermal annealing tools); chemical vapor deposition system operation, safety, environmental, and health issues (covering gas delivery, corrosive and flammable gas storage and plumbing, regulators, and mass flow controllers); and vacuum deposition/etching system operation, safety, environmental, and health issues (covering microwave and RF power supplies and tuners, heating and cooling units, vacuum gauges, valves, and process controllers). Specific materials handling issues will include DI water, solvents, cleaners, ion implantation sources, diffusion sources, photoresists, developers, metals, dielectrics, and toxic, flammable, corrosive and high purity gases as well as packaging materials.

Prerequisite(s): BIO 150, CHE 150, COM 121 or COM 122, COM 141, IFT 110, MAT 165, MAT 210, NSC 180, and NSC 200 PHY 150