NSC 215 - Materials Modification in Nanofabrication

3 Credit Hours (Lab)

This course will cover in detail the processing steps used in modifying material properties in Nanofabrication. Included will be growth and annealing processes utilizing horizontal and vertical furnaces as well as rapid thermal annealing. The impact of thermal processing on defects, gettering, impurities and overall electrical, mechanical, optical, electrical and chemical properties will be studied. The student will grow and measure gate and field oxides, implant and activate source and drain regions, and evaluate thermal budget requirements using state-of-the-art tools. Included also will be other modification technologies such as ion implantation, diffusion and surface preparation and treatment. Substrate preparation processing such as slicing, etching, polishing, and epitaxial growth will be covered.

Prerequisite(s): NSC 214